JPH062004Y2 - 真空機器用シリンダ - Google Patents

真空機器用シリンダ

Info

Publication number
JPH062004Y2
JPH062004Y2 JP1986125140U JP12514086U JPH062004Y2 JP H062004 Y2 JPH062004 Y2 JP H062004Y2 JP 1986125140 U JP1986125140 U JP 1986125140U JP 12514086 U JP12514086 U JP 12514086U JP H062004 Y2 JPH062004 Y2 JP H062004Y2
Authority
JP
Japan
Prior art keywords
piston
cylinder
main
sub
main cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986125140U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330607U (en]
Inventor
洋補 川崎
裕義 室田
信行 高橋
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1986125140U priority Critical patent/JPH062004Y2/ja
Publication of JPS6330607U publication Critical patent/JPS6330607U/ja
Application granted granted Critical
Publication of JPH062004Y2 publication Critical patent/JPH062004Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP1986125140U 1986-08-15 1986-08-15 真空機器用シリンダ Expired - Lifetime JPH062004Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986125140U JPH062004Y2 (ja) 1986-08-15 1986-08-15 真空機器用シリンダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986125140U JPH062004Y2 (ja) 1986-08-15 1986-08-15 真空機器用シリンダ

Publications (2)

Publication Number Publication Date
JPS6330607U JPS6330607U (en]) 1988-02-29
JPH062004Y2 true JPH062004Y2 (ja) 1994-01-19

Family

ID=31017786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986125140U Expired - Lifetime JPH062004Y2 (ja) 1986-08-15 1986-08-15 真空機器用シリンダ

Country Status (1)

Country Link
JP (1) JPH062004Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50127071A (en]) * 1974-03-25 1975-10-06
JPS5594008A (en) * 1979-01-09 1980-07-17 Caterpillar Mitsubishi Ltd Device for adjusting stroke of hydraulic cylinder
JPS58225213A (ja) * 1982-06-22 1983-12-27 ヤマザキマザック株式会社 位置決め機構

Also Published As

Publication number Publication date
JPS6330607U (en]) 1988-02-29

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